Inventor
LANE SARAH L
US8 patents
⚠️ This page may combine multiple inventors who share the name “LANE SARAH L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
6 patentsUS6939797B2Sep 6, 2005
Advanced BEOL interconnect structures with low-k PE CVD cap layer and method thereof
IBM26 citations91
US6737747B2May 18, 2004
Advanced BEOL interconnect structures with low-k PE CVD cap layer and method thereof
IBM43 citations91
US7585722B2Sep 8, 2009
Integrated circuit comb capacitor
IBM9 citations84
US7202564B2Apr 10, 2007
Advanced low dielectric constant organosilicon plasma chemical vapor deposition films
IBM11 citations83
US7494938B2Feb 24, 2009
Advanced low dielectric constant organosilicon plasma chemical vapor deposition films
IBM5 citations73
US7998880B2Aug 16, 2011
Low k dielectric CVD film formation process with in-situ imbedded nanolayers to improve mechanical properties
IBM0 citations51