Inventor
IDA KENSAKU
US5 patents
⚠️ This page may combine multiple inventors who share the name “IDA KENSAKU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
3 patentsUS7202564B2Apr 10, 2007
Advanced low dielectric constant organosilicon plasma chemical vapor deposition films
IBM11 citations83
US7494938B2Feb 24, 2009
Advanced low dielectric constant organosilicon plasma chemical vapor deposition films
IBM5 citations73
US7998880B2Aug 16, 2011
Low k dielectric CVD film formation process with in-situ imbedded nanolayers to improve mechanical properties
IBM0 citations51