P

Inventor

VAN GREEVENBROEK HENDRIKUS ROBERTUS MARIE

NL12 patents
⚠️ This page may combine multiple inventors who share the name “VAN GREEVENBROEK HENDRIKUS ROBERTUS MARIE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

6 patents
US9442380B2Sep 13, 2016

Method and apparatus for generating radiation

ASML NETHERLANDS BV4 citations71
US11366399B2Jun 21, 2022

Laser beam monitoring system

ASML NETHERLANDS BV0 citations60
US10222703B2Mar 5, 2019

Lithographic apparatus and method

ASML NETHERLANDS BV0 citations51
US9778575B2Oct 3, 2017

Lithographic apparatus and method

ASML NETHERLANDS BV0 citations51
US9170498B2Oct 27, 2015

Lithographic apparatus and a method for determining a polarization property of a projection system using an adjustable polarizer and interferometric sensor

ASML NETHERLANDS BV0 citations49
US7872731B2Jan 18, 2011

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV0 citations33

DIERICHS MARCEL MATHIJS THEODORE MARIE

2 patents
US8279405B2Oct 2, 2012

Lithographic apparatus and device manufacturing method

DIERICHS MARCEL MATHIJS THEODORE MARIE0 citations51
US9188881B2Nov 17, 2015

Lithographic apparatus and method for reducing stray radiation

DIERICHS MARCEL MATHIJS THEODORE MARIE0 citations39

ZIMMERMAN RICHARD CARL

1 patent
US8629973B2Jan 14, 2014

Lithographic apparatus and method for illumination uniformity correction and uniformity drift compensation

ZIMMERMAN RICHARD CARL13 citations78

MULDER HEINE MELLE

1 patent
US8937706B2Jan 20, 2015

Lithographic apparatus and method

MULDER HEINE MELLE3 citations60

VAN GREEVENBROEK HENDRIKUS ROBERTUS MARIE

1 patent
US8441611B2May 14, 2013

Lithographic apparatus and method

VAN GREEVENBROEK HENDRIKUS ROBERTUS MARIE2 citations54

ZEISS CARL SMT AG

1 patent
US7952685B2May 31, 2011

Illuminator for a lithographic apparatus and method

ZEISS CARL SMT AG0 citations49