P

Inventor

FREISCHLAD KLAUS R

US5 patents
⚠️ This page may combine multiple inventors who share the name “FREISCHLAD KLAUS R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR CORP

3 patents
US10018572B2Jul 10, 2018

Front quartersphere scattered light analysis

KLA TENCOR CORP2 citations82
US9488591B2Nov 8, 2016

Front quartersphere scattered light analysis

KLA TENCOR CORP3 citations82
US9528942B2Dec 27, 2016

Front quartersphere scattered light analysis

KLA TENCOR CORP1 citations61

PHASE SHIFT TECHNOLOGY INC

1 patent
US5737081AApr 7, 1998

Extended-source low coherence interferometer for flatness testing

PHASE SHIFT TECHNOLOGY INC18 citations80

BILLS RICHARD E

1 patent
US9110033B2Aug 18, 2015

Front quartersphere scattered light analysis

BILLS RICHARD E2 citations69