Inventor
UMEHARA NAOYUKI
JP6 patents
⚠️ This page may combine multiple inventors who share the name “UMEHARA NAOYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
5 patentsUS10264662B2Apr 16, 2019
Plasma processing apparatus
TOKYO ELECTRON LTD8 citations83
US9640368B2May 2, 2017
Plasma processing apparatus
TOKYO ELECTRON LTD11 citations78
US9736921B2Aug 15, 2017
Method for impedance matching of plasma processing apparatus
TOKYO ELECTRON LTD3 citations72
US10615005B2Apr 7, 2020
Plasma generating method
TOKYO ELECTRON LTD1 citations61
US8038833B2Oct 18, 2011
Plasma processing apparatus
TOKYO ELECTRON LTD2 citations55