Inventor
BOWERS CHARLES W
US15 patents
⚠️ This page may combine multiple inventors who share the name “BOWERS CHARLES W”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ECO SNOW SYSTEMS INC
10 patentsUS6066032AMay 23, 2000
Wafer cleaning using a laser and carbon dioxide snow
ECO SNOW SYSTEMS INC109 citations95
US5853962ADec 29, 1998
Photoresist and redeposition removal using carbon dioxide jet spray
ECO SNOW SYSTEMS INC68 citations95
US5837064ANov 17, 1998
Electrostatic discharge protection of static sensitive devices cleaned with carbon dioxide spray
ECO SNOW SYSTEMS INC68 citations95
US5766061AJun 16, 1998
Wafer cassette cleaning using carbon dioxide jet spray
ECO SNOW SYSTEMS INC66 citations95
US5989355ANov 23, 1999
Apparatus for cleaning and testing precision components of hard drives and the like
ECO SNOW SYSTEMS INC61 citations93
US6500758B1Dec 31, 2002
Method for selective metal film layer removal using carbon dioxide jet spray
ECO SNOW SYSTEMS INC24 citations92
US5766368AJun 16, 1998
Integrated circuit chip module cleaning using a carbon dioxide jet spray
ECO SNOW SYSTEMS INC48 citations92
US6146466ANov 14, 2000
Use of electrostatic bias to clean non-electrostatically sensitive components with a carbon dioxide spray
ECO SNOW SYSTEMS INC14 citations73
US6276169B1Aug 21, 2001
Apparatus and method for analysis of impurities in liquid carbon dioxide
ECO SNOW SYSTEMS INC4 citations62
US6405560B2Jun 18, 2002
Apparatus for analysis of impurities in liquid carbon dioxide
ECO SNOW SYSTEMS INC0 citations51