Inventor
HAYASHI TOYOHIDE
JP21 patents
⚠️ This page may combine multiple inventors who share the name “HAYASHI TOYOHIDE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SCREEN HOLDINGS CO LTD
11 patentsUS11075095B2Jul 27, 2021
Substrate processing apparatus
SCREEN HOLDINGS CO LTD7 citations82
US11410863B2Aug 9, 2022
Substrate processing device including heater between substrate and spin base
SCREEN HOLDINGS CO LTD2 citations71
US10332761B2Jun 25, 2019
Substrate processing apparatus
SCREEN HOLDINGS CO LTD4 citations71
US9810532B2Nov 7, 2017
Substrate treating apparatus and substrate treating methods
SCREEN HOLDINGS CO LTD6 citations71
US10727090B2Jul 28, 2020
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD3 citations70
US9607844B2Mar 28, 2017
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD3 citations70
US11610790B2Mar 21, 2023
Substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations61
US10593587B2Mar 17, 2020
Substrate treatment apparatus
SCREEN HOLDINGS CO LTD0 citations52
US9449861B2Sep 20, 2016
Substrate processing apparatus
SCREEN HOLDINGS CO LTD1 citations51
US10297476B2May 21, 2019
Substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations40
US10748795B2Aug 18, 2020
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations36
DAINIPPON SCREEN MFG
7 patentsUS5762684AJun 9, 1998
Treating liquid supplying method and apparatus
DAINIPPON SCREEN MFG100 citations96
US6403924B1Jun 11, 2002
Apparatus for and method of heat treatment and substrate processing apparatus
DAINIPPON SCREEN MFG45 citations92
US6053058AApr 25, 2000
Atmosphere concentration monitoring for substrate processing apparatus and life determination for atmosphere processing unit of substrate processing apparatus
DAINIPPON SCREEN MFG19 citations82
US10032654B2Jul 24, 2018
Substrate treatment apparatus
DAINIPPON SCREEN MFG3 citations72
US8877076B2Nov 4, 2014
Substrate treatment apparatus and substrate treatment method
DAINIPPON SCREEN MFG5 citations72
US7785421B2Aug 31, 2010
Substrate treatment method and substrate treatment apparatus
DAINIPPON SCREEN MFG2 citations62
US9437464B2Sep 6, 2016
Substrate treating method for treating substrates with treating liquids
DAINIPPON SCREEN MFG0 citations51