Inventor
KOLI DINESH
US4 patents
Patents
4 patentsUS10211103B1Feb 19, 2019
Advanced structure for self-aligned contact and method for producing the same
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US9136131B2Sep 15, 2015
Common fill of gate and source and drain contacts
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US10020260B1Jul 10, 2018
Corrosion and/or etch protection layer for contacts and interconnect metallization integration
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US9299584B2Mar 29, 2016
Methods of forming integrated circuits with a planarized permanent layer and methods for forming FinFET devices with a planarized permanent layer
GLOBALFOUNDRIES INC0 citations45