Inventor
CHAO TAI FONG
US4 patents
Patents
4 patentsUS10211103B1Feb 19, 2019
Advanced structure for self-aligned contact and method for producing the same
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US9865543B1Jan 9, 2018
Structure and method for inhibiting cobalt diffusion
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US10256089B2Apr 9, 2019
Replacement contact cuts with an encapsulated low-K dielectric
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US9966272B1May 8, 2018
Methods for nitride planarization using dielectric
GLOBALFOUNDRIES INC0 citations39