Inventor

OKUBO TOMOYA

JP4 patents

⚠️ This page may combine multiple inventors who share the name “OKUBO TOMOYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

3 patents

US10541145B2Jan 21, 2020

Substrate processing apparatus and substrate processing method

TOKYO ELECTRON LTD8 citations82

US10985029B2Apr 20, 2021

Substrate processing apparatus and substrate processing method

TOKYO ELECTRON LTD0 citations61

US7231321B2Jun 12, 2007

Method of resetting substrate processing apparatus, storage medium storing program for implementing the method, and substrate processing apparatus

TOKYO ELECTRON LTD3 citations58

ENDOH SHOSUKE

1 patent

US8124539B2Feb 28, 2012

Plasma processing apparatus, focus ring, and susceptor

ENDOH SHOSUKE12 citations80