Inventor
UEDA TATSUSHI
JP16 patents
⚠️ This page may combine multiple inventors who share the name “UEDA TATSUSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KOKUSAI ELECTRIC CORP
7 patentsUS10192735B2Jan 29, 2019
Substrate processing method and substrate processing apparatus
KOKUSAI ELECTRIC CORP2 citations71
US12154826B2Nov 26, 2024
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
KOKUSAI ELECTRIC CORP0 citations59
US11664275B2May 30, 2023
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
KOKUSAI ELECTRIC CORP1 citations59
US12040161B2Jul 16, 2024
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
KOKUSAI ELECTRIC CORP0 citations58
US11908682B2Feb 20, 2024
Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium
KOKUSAI ELECTRIC CORP0 citations58
US11081362B2Aug 3, 2021
Method of manufacturing semiconductor device, and recording medium
KOKUSAI ELECTRIC CORP0 citations58
US12575347B2Mar 10, 2026
Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium
KOKUSAI ELECTRIC CORP0 citations48
HITACHI INT ELECTRIC INC
6 patentsUS9236242B2Jan 12, 2016
Substrate processing method and substrate processing apparatus
HITACHI INT ELECTRIC INC6 citations82
US9786493B2Oct 10, 2017
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
HITACHI INT ELECTRIC INC2 citations71
US10546761B2Jan 28, 2020
Substrate processing apparatus
HITACHI INT ELECTRIC INC1 citations61
US9754780B2Sep 5, 2017
Substrate processing method and substrate processing apparatus
HITACHI INT ELECTRIC INC1 citations61
US7651954B2Jan 26, 2010
Manufacturing method of semiconductor device and semiconductor device manufacturing apparatus
HITACHI INT ELECTRIC INC0 citations50
US9257271B2Feb 9, 2016
Semiconductor device manufacturing method, substrate processing apparatus, and non-transitory recording medium
HITACHI INT ELECTRIC INC0 citations40