Inventor

TAKAMI EIKO

JP3 patents

Patents

3 patents

US12040161B2Jul 16, 2024

Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

KOKUSAI ELECTRIC CORP0 citations58

US11908682B2Feb 20, 2024

Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium

KOKUSAI ELECTRIC CORP0 citations58

US11081362B2Aug 3, 2021

Method of manufacturing semiconductor device, and recording medium

KOKUSAI ELECTRIC CORP0 citations58