Inventor
MINAMI MASAKAZU
JP19 patents
⚠️ This page may combine multiple inventors who share the name “MINAMI MASAKAZU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HORIBA STEC CO LTD
14 patentsUS10655220B2May 19, 2020
Gas control system, deposition apparatus including gas control system, and program and gas control method used for gas control system
HORIBA STEC CO LTD7 citations83
US11631596B2Apr 18, 2023
Concentration control apparatus, source consumption quantity estimation method, and program recording medium on which a program for a concentration control apparatus is recorded
HORIBA STEC CO LTD3 citations73
US10927462B2Feb 23, 2021
Gas control system and film formation apparatus provided with gas control system
HORIBA STEC CO LTD4 citations71
US10138555B2Nov 27, 2018
Gas control system and program for gas control system
HORIBA STEC CO LTD3 citations69
US9823181B2Nov 21, 2017
Cp2Mg concentration measuring device
HORIBA STEC CO LTD2 citations69
US12332175B2Jun 17, 2025
Optical measurement cell, optical analyzer, window forming member, and method of manufacturing optical measurement cell
HORIBA STEC CO LTD0 citations62
US10718050B2Jul 21, 2020
Concentration control apparatus and material gas supply system
HORIBA STEC CO LTD1 citations62
US12429420B2Sep 30, 2025
Gas analysis apparatus and gas analysis method
HORIBA STEC CO LTD0 citations60
US11519070B2Dec 6, 2022
Vaporization device, film formation device, program for a concentration control mechanism, and concentration control method
HORIBA STEC CO LTD0 citations52
US11365480B2Jun 21, 2022
Concentration control apparatus, zero point adjustment method, and program recording medium recorded with concentration control apparatus program
HORIBA STEC CO LTD0 citations52
US11493443B2Nov 8, 2022
Light absorbance analysis apparatus and program record medium for recording programs of light absorbance analysis apparatus
HORIBA STEC CO LTD0 citations51
US11226235B2Jan 18, 2022
Absorption spectroscopic system, program recording medium for an absorption spectroscopic system and absorbance measurement method
HORIBA STEC CO LTD0 citations51
US9970865B2May 15, 2018
Decomposition detecting unit, concentration measuring unit, and concentration control apparatus
HORIBA STEC CO LTD1 citations51
US12467856B2Nov 11, 2025
Gas analysis device and gas analysis method
HORIBA STEC CO LTD0 citations49
MINAMI MASAKAZU
3 patentsTOKYO ELECTRON LTD
2 patentsUS7604010B2Oct 20, 2009
Film formation apparatus and method of using the same
TOKYO ELECTRON LTD13 citations82
US11796460B2Oct 24, 2023
Absorbance analysis apparatus for DCR gas, absorbance analysis method for DCR gas, and absorbance analysis program recording medium on which program for DCR gas is recorded
TOKYO ELECTRON LTD0 citations50