Inventor
MITTAL DEVEN MATTHEW RAJ
US5 patents
Patents
5 patentsUS10727059B2Jul 28, 2020
Highly etch selective amorphous carbon film
APPLIED MATERIALS INC6 citations79
US12142475B2Nov 12, 2024
Sequential plasma and thermal treatment
APPLIED MATERIALS INC0 citations61
US12112949B2Oct 8, 2024
Highly etch selective amorphous carbon film
APPLIED MATERIALS INC0 citations59
US12014927B2Jun 18, 2024
Highly etch selective amorphous carbon film
APPLIED MATERIALS INC0 citations59
US12094709B2Sep 17, 2024
Plasma treatment process to densify oxide layers
APPLIED MATERIALS INC0 citations47