Inventor
FALK SCOTT
US7 patents
Patents
7 patentsUS11469107B2Oct 11, 2022
Highly etch selective amorphous carbon film
APPLIED MATERIALS INC4 citations80
US11201057B2Dec 14, 2021
Techniques and apparatus for anisotropic stress compensation in substrates using ion implantation
APPLIED MATERIALS INC3 citations69
US12112949B2Oct 8, 2024
Highly etch selective amorphous carbon film
APPLIED MATERIALS INC0 citations59
US12014927B2Jun 18, 2024
Highly etch selective amorphous carbon film
APPLIED MATERIALS INC0 citations59
US11875995B2Jan 16, 2024
Techniques and apparatus for anisotropic stress compensation in substrates using ion implantation
APPLIED MATERIALS INC0 citations59
US12444615B2Oct 14, 2025
Forming a doped hardmask
APPLIED MATERIALS INC0 citations57
US11551904B2Jan 10, 2023
System and technique for profile modulation using high tilt angles
APPLIED MATERIALS INC0 citations56