P

Inventor

HATTORI KEN

JP8 patents
⚠️ This page may combine multiple inventors who share the name “HATTORI KEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NIKON CORP

5 patents
US5194743AMar 16, 1993

Device for positioning circular semiconductor wafers

NIKON CORP118 citations97
US5361121ANov 1, 1994

Periphery exposing method and apparatus therefor

NIKON CORP38 citations92
US5229811AJul 20, 1993

Apparatus for exposing peripheral portion of substrate

NIKON CORP21 citations92
US5168304ADec 1, 1992

Exposure apparatus

NIKON CORP20 citations80
US7397534B2Jul 8, 2008

Exposure apparatus and device manufacturing method

NIKON CORP4 citations61

UNIV NAGOYA

2 patents
US5389786AFeb 14, 1995

Method of quantitative determination of defect concentration on surfaces

UNIV NAGOYA11 citations69
US5367980ANov 29, 1994

Method of producing defect-free perfect surfaces

UNIV NAGOYA13 citations66

FUJITSU LTD

1 patent
US5572533ANov 5, 1996

Method and apparatus for monitoring and fault-analyzing networks

FUJITSU LTD37 citations86