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Inventor
YAMADA KAWAKATSU
JP
2 patents
⚠️ This page may combine multiple inventors who share the name “YAMADA KAWAKATSU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AGENCY IND SCIENCE TECHN
1 patent
US5454347A
Oct 3, 1995
Laser-beam annealing apparatus
AGENCY IND SCIENCE TECHN
58 citations
92
NAT INST RES INORGANIC MAT
1 patent
US5286533A
Feb 15, 1994
Method of making hard boron nitride by a plasma CVD method employing beam irradiation
NAT INST RES INORGANIC MAT
14 citations
67