Inventor
ZHANG ZUOYING L
US7 patents
⚠️ This page may combine multiple inventors who share the name “ZHANG ZUOYING L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CORNELL RES FOUNDATION INC
4 patentsUS5198390AMar 30, 1993
RIE process for fabricating submicron, silicon electromechanical structures
CORNELL RES FOUNDATION INC169 citations98
US5316979AMay 31, 1994
RIE process for fabricating submicron, silicon electromechanical structures
CORNELL RES FOUNDATION INC116 citations97
US5072288ADec 10, 1991
Microdynamic release structure
CORNELL RES FOUNDATION INC114 citations96
US5149673ASep 22, 1992
Selective chemical vapor deposition of tungsten for microdynamic structures
CORNELL RES FOUNDATION INC41 citations92