Inventor
HOANG ANH N
US7 patents
⚠️ This page may combine multiple inventors who share the name “HOANG ANH N”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LUXTRON CORP
5 patentsUS6572265B1Jun 3, 2003
In situ optical surface temperature measuring techniques and devices
LUXTRON CORP56 citations92
US7042581B2May 9, 2006
Optical techniques for measuring layer thicknesses and other surface characteristics of objects such as semiconductor wafers
LUXTRON CORP34 citations91
US6654132B1Nov 25, 2003
Optical techniques for measuring layer thicknesses and other surface characteristics of objects such as semiconductor wafers
LUXTRON CORP35 citations91
US6570662B1May 27, 2003
Optical techniques for measuring layer thicknesses and other surface characteristics of objects such as semiconductor wafers
LUXTRON CORP15 citations83
US6934040B1Aug 23, 2005
Optical techniques for measuring layer thicknesses and other surface characteristics of objects such as semiconductor wafers
LUXTRON CORP10 citations72