Inventor
MUENZEL NORBERT
DE17 patents
⚠️ This page may combine multiple inventors who share the name “MUENZEL NORBERT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
OLIN MICROELECTRONIC CHEM INC
4 patentsUS5849808ADec 15, 1998
Organic solvent soluble photoresists which are developable in aqueous alkaline solutions
OLIN MICROELECTRONIC CHEM INC23 citations92
US5928818AJul 27, 1999
Photoresist compositions
OLIN MICROELECTRONIC CHEM INC28 citations91
US5714559AFeb 3, 1998
Crosslinked polymers
OLIN MICROELECTRONIC CHEM INC16 citations80
US5834531ANov 10, 1998
Crosslinked polymers
OLIN MICROELECTRONIC CHEM INC5 citations60
CIBA GEIGY CORP
3 patentsUS5296330AMar 22, 1994
Positive photoresists containing quinone diazide photosensitizer, alkali-soluble resin and tetra(hydroxyphenyl) alkane additive
CIBA GEIGY CORP108 citations96
US5436098AJul 25, 1995
Positive photoresists with enhanced resolution and reduced crystallization containing novel tetra(hydroxyphenyl)alkanes
CIBA GEIGY CORP97 citations95
US5627011AMay 6, 1997
High resolution i-line photoresist of high sensitivity
CIBA GEIGY CORP43 citations92
OCG MICROELECTRONIC MATERIALS
3 patentsUS5558978ASep 24, 1996
Photoresist compositions containing copolymers having acid-labile groups and recurring units derived from either N-(hydroxymethyl)maleimide or N-(acetoxymethyl)maleimide or both
OCG MICROELECTRONIC MATERIALS44 citations91
US5776657AJul 7, 1998
Wet-chemical developable, etch-stable photoresist for UV radiation with a wavelength below 200 NM
OCG MICROELECTRONIC MATERIALS10 citations73
US5554797ASep 10, 1996
Tetra (hydroxphenyl) alkanes
OCG MICROELECTRONIC MATERIALS4 citations62