Inventor
ATHAVALE SATISH D
US11 patents
⚠️ This page may combine multiple inventors who share the name “ATHAVALE SATISH D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
5 patentsUS6348374B1Feb 19, 2002
Process for 4F2 STC cell having vertical MOSFET and buried-bitline conductor structure
IBM45 citations92
US6207584B1Mar 27, 2001
High dielectric constant material deposition to achieve high capacitance
IBM24 citations90
US6670233B2Dec 30, 2003
Methods of patterning a multi-layer film stack and forming a lower electrode of a capacitor
IBM6 citations72
US6559001B2May 6, 2003
Methods of patterning a multi-layer film stack and forming a lower electrode of a capacitor
IBM9 citations72
US6518118B2Feb 11, 2003
Structure and process for buried bitline and single sided buried conductor formation
IBM4 citations63
INFINEON TECHNOLOGIES AG
3 patentsUS6420272B1Jul 16, 2002
Method for removal of hard mask used to define noble metal electrode
INFINEON TECHNOLOGIES AG29 citations90
US6420099B1Jul 16, 2002
Tungsten hard mask for dry etching aluminum-containing layers
INFINEON TECHNOLOGIES AG16 citations84
US6548414B2Apr 15, 2003
Method of plasma etching thin films of difficult to dry etch materials
INFINEON TECHNOLOGIES AG7 citations73