Inventor
SIMONS JOHN PATRICK
US6 patents
Patents
6 patentsUS6346484B1Feb 12, 2002
Method for selective extraction of sacrificial place-holding material used in fabrication of air gap-containing interconnect structures
IBM80 citations97
US6558475B1May 6, 2003
Process for cleaning a workpiece using supercritical carbon dioxide
IBM126 citations96
US6892741B2May 17, 2005
Apparatus and process for supercritical carbon dioxide phase processing
IBM5 citations71
US5770345AJun 23, 1998
Photoresist having increased sensitivity and use thereof
IBM9 citations70
US5753412AMay 19, 1998
Photoresist having increased sensitivity and use thereof
IBM11 citations70
US6953042B2Oct 11, 2005
Apparatus and process for supercritical carbon dioxide phase processing
IBM2 citations60