Inventor
VOLODARSKY KONSTANTIN
US24 patents
⚠️ This page may combine multiple inventors who share the name “VOLODARSKY KONSTANTIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NUTOOL INC
8 patentsUS6352623B1Mar 5, 2002
Vertically configured chamber used for multiple processes
NUTOOL INC131 citations98
US6478936B1Nov 12, 2002
Anode assembly for plating and planarizing a conductive layer
NUTOOL INC46 citations96
US6612915B1Sep 2, 2003
Work piece carrier head for plating and polishing
NUTOOL INC74 citations94
US6716084B2Apr 6, 2004
Carrier head for holding a wafer and allowing processing on a front face thereof to occur
NUTOOL INC20 citations92
US6468139B1Oct 22, 2002
Polishing apparatus and method with a refreshing polishing belt and loadable housing
NUTOOL INC26 citations92
US6464571B2Oct 15, 2002
Polishing apparatus and method with belt drive system adapted to extend the lifetime of a refreshing polishing belt provided therein
NUTOOL INC19 citations92
US6604988B2Aug 12, 2003
Polishing apparatus and method with belt drive system adapted to extend the lifetime of a refreshing polishing belt provided therein
NUTOOL INC8 citations74
US6773576B2Aug 10, 2004
Anode assembly for plating and planarizing a conductive layer
NUTOOL INC5 citations73
ASM NUTOOL INC
6 patentsUS6988932B2Jan 24, 2006
Apparatus of sealing wafer backside for full-face processing
ASM NUTOOL INC18 citations92
US6939206B2Sep 6, 2005
Method and apparatus of sealing wafer backside for full-face electrochemical plating
ASM NUTOOL INC33 citations92
US6855037B2Feb 15, 2005
Method of sealing wafer backside for full-face electrochemical plating
ASM NUTOOL INC15 citations84
US6932679B2Aug 23, 2005
Apparatus and method for loading a wafer in polishing system
ASM NUTOOL INC3 citations63
US6969456B2Nov 29, 2005
Method of using vertically configured chamber used for multiple processes
ASM NUTOOL INC2 citations62
US6884334B2Apr 26, 2005
Vertically configured chamber used for multiple processes
ASM NUTOOL INC3 citations60
ONTRAK SYSTEMS INC
4 patentsUS5803799ASep 8, 1998
Wafer polishing head
ONTRAK SYSTEMS INC154 citations99
US5913714AJun 22, 1999
Method for dressing a polishing pad during polishing of a semiconductor wafer
ONTRAK SYSTEMS INC47 citations96
US5857899AJan 12, 1999
Wafer polishing head with pad dressing element
ONTRAK SYSTEMS INC49 citations96
US5800248ASep 1, 1998
Control of chemical-mechanical polishing rate across a substrate surface
ONTRAK SYSTEMS INC133 citations96
LAM RES CORP
4 patentsUS5871390AFeb 16, 1999
Method and apparatus for aligning and tensioning a pad/belt used in linear planarization for chemical mechanical polishing
LAM RES CORP75 citations96
US6244946B1Jun 12, 2001
Polishing head with removable subcarrier
LAM RES CORP8 citations74
US6425812B1Jul 30, 2002
Polishing head for chemical mechanical polishing using linear planarization technology
LAM RES CORP13 citations73
US6533646B2Mar 18, 2003
Polishing head with removable subcarrier
LAM RES CORP5 citations63