Inventor
HOHENWARTER KARL-HEINZ
AT10 patents
⚠️ This page may combine multiple inventors who share the name “HOHENWARTER KARL-HEINZ”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES AG
5 patentsUS7837803B2Nov 23, 2010
Device and method for wet treating disc-shaped articles
LAM RES AG22 citations90
US10658204B2May 19, 2020
Spin chuck with concentrated center and radial heating
LAM RES AG7 citations79
US9536770B2Jan 3, 2017
Method and apparatus for liquid treatment of wafer shaped articles
LAM RES AG2 citations63
US12198945B2Jan 14, 2025
Vapor delivery head for preventing stiction of high aspect ratio structures and/or repairing high aspect ratio structures
LAM RES AG0 citations58
US10068792B2Sep 4, 2018
Method and apparatus for liquid treatment of wafer shaped articles
LAM RES AG0 citations40
HOHENWARTER KARL-HEINZ
4 patentsUS8926788B2Jan 6, 2015
Closed chamber for wafer wet processing
HOHENWARTER KARL-HEINZ14 citations81
US8955529B2Feb 17, 2015
Device and method for wet treating disc-shaped articles
HOHENWARTER KARL-HEINZ4 citations70
US9355883B2May 31, 2016
Method and apparatus for liquid treatment of wafer shaped articles
HOHENWARTER KARL-HEINZ2 citations51
US9316443B2Apr 19, 2016
Method and apparatus for liquid treatment of wafer shaped articles
HOHENWARTER KARL-HEINZ1 citations40