Inventor

SEMMELROCK CHRISTOPH

AT3 patents

⚠️ This page may combine multiple inventors who share the name “SEMMELROCK CHRISTOPH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES AG

2 patents

US11810796B2Nov 7, 2023

Wafer cleaning method and apparatus therefore

LAM RES AG0 citations41

US10410888B2Sep 10, 2019

Device and method for removing liquid from a surface of a disc-like article

LAM RES AG0 citations32

HOHENWARTER KARL-HEINZ

1 patent

US9316443B2Apr 19, 2016

Method and apparatus for liquid treatment of wafer shaped articles

HOHENWARTER KARL-HEINZ1 citations40