Inventor
KITO YOSHIAKI
JP10 patents
⚠️ This page may combine multiple inventors who share the name “KITO YOSHIAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
6 patentsUS9539800B2Jan 10, 2017
Substrate bonding apparatus, substrate holding apparatus, substrate bonding method, substrate holding method, multilayered semiconductor device, and multilayered substrate
NIKON CORP9 citations82
US10246287B2Apr 2, 2019
Processing system and device manufacturing method
NIKON CORP2 citations72
US11791223B2Oct 17, 2023
Substrate bonding apparatus and substrate bonding method
NIKON CORP1 citations56
US11143862B2Oct 12, 2021
Pattern drawing device, pattern drawing method, and method for manufacturing device
NIKON CORP1 citations56
US10683185B2Jun 16, 2020
Processing system and device manufacturing method
NIKON CORP0 citations51
US8994957B2Mar 31, 2015
Detection method and detection apparatus
NIKON CORP0 citations51