Inventor
WU SHENG-WEI
TW16 patents
⚠️ This page may combine multiple inventors who share the name “WU SHENG-WEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
12 patentsUS10962285B2Mar 30, 2021
Wafer drying system
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations71
US11927392B2Mar 12, 2024
Wafer drying system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11581199B2Feb 14, 2023
Wafer drying system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12543528B2Feb 3, 2026
Contamination control in semiconductor manufacturing systems
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US12257610B2Mar 25, 2025
Apparatus and method for wafer cleaning
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US12020964B2Jun 25, 2024
Contamination control in semiconductor manufacturing systems
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11958090B2Apr 16, 2024
Apparatus and method for wafer cleaning
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11766703B2Sep 26, 2023
Apparatus and method for wafer cleaning
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11282728B2Mar 22, 2022
Contamination control in semiconductor manufacturing systems
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US10943804B2Mar 9, 2021
Monitoring of process chamber
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations59
US12521775B2Jan 13, 2026
Semiconductor device manufacturing system and method for manufacturing semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations47
US9605345B2Mar 28, 2017
Vertical furnace for improving wafer uniformity
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations34