Inventor
BURGESS STEPHEN R
GB18 patents
⚠️ This page may combine multiple inventors who share the name “BURGESS STEPHEN R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SPTS TECHNOLOGIES LTD
14 patentsUS10900114B2Jan 26, 2021
Method and apparatus for depositing a material
SPTS TECHNOLOGIES LTD3 citations69
US10153135B2Dec 11, 2018
Plasma etching apparatus
SPTS TECHNOLOGIES LTD2 citations67
US11127568B2Sep 21, 2021
Plasma etching apparatus
SPTS TECHNOLOGIES LTD1 citations59
US10622193B2Apr 14, 2020
Plasma etching apparatus
SPTS TECHNOLOGIES LTD1 citations59
US11875980B2Jan 16, 2024
Method and apparatus for depositing a material
SPTS TECHNOLOGIES LTD0 citations58
US10601388B2Mar 24, 2020
Method of deposition
SPTS TECHNOLOGIES LTD1 citations56
US9472610B2Oct 18, 2016
Substrate
SPTS TECHNOLOGIES LTD2 citations55
US9803272B2Oct 31, 2017
Deposition of silicon dioxide
SPTS TECHNOLOGIES LTD0 citations51
US10096468B2Oct 9, 2018
Method of improving adhesion
SPTS TECHNOLOGIES LTD0 citations50
US9728432B2Aug 8, 2017
Method of degassing
SPTS TECHNOLOGIES LTD1 citations48
US12555743B2Feb 17, 2026
Plasma producing apparatus
SPTS TECHNOLOGIES LTD0 citations44
US9048066B2Jun 2, 2015
Method of etching
SPTS TECHNOLOGIES LTD1 citations44
US8728953B2May 20, 2014
Method and apparatus for processing a semiconductor workpiece
SPTS TECHNOLOGIES LTD0 citations30
US9783886B2Oct 10, 2017
PE-CVD apparatus and method
SPTS TECHNOLOGIES LTD0 citations28