Inventor
ROY SHAMBHU N
US14 patents
⚠️ This page may combine multiple inventors who share the name “ROY SHAMBHU N”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
6 patentsUS9728437B2Aug 8, 2017
High temperature chuck for plasma processing systems
APPLIED MATERIALS INC123 citations98
US9484202B1Nov 1, 2016
Apparatus and methods for spacer deposition and selective removal in an advanced patterning process
APPLIED MATERIALS INC22 citations92
US9818585B2Nov 14, 2017
In situ plasma clean for removal of residue from pedestal surface without breaking vacuum
APPLIED MATERIALS INC9 citations82
US10879094B2Dec 29, 2020
Electrostatic chucking force measurement tool for process chamber carriers
APPLIED MATERIALS INC1 citations60
US10468285B2Nov 5, 2019
High temperature chuck for plasma processing systems
APPLIED MATERIALS INC0 citations52
US9382625B2Jul 5, 2016
Remote plasma source based cyclic CVD process for nanocrystalline diamond deposition
APPLIED MATERIALS INC0 citations42
ROY SHAMBHU N
4 patentsUS9447499B2Sep 20, 2016
Dual plenum, axi-symmetric showerhead with edge-to-center gas delivery
ROY SHAMBHU N24 citations92
US8559159B2Oct 15, 2013
Electrostatic chuck and methods of use thereof
ROY SHAMBHU N21 citations92
US9337067B2May 10, 2016
High temperature electrostatic chuck with radial thermal chokes
ROY SHAMBHU N17 citations82
US9064911B2Jun 23, 2015
Heated cooling plate for E-chucks and pedestals
ROY SHAMBHU N4 citations68