Inventor

LOO DAVID H

US3 patents

⚠️ This page may combine multiple inventors who share the name “LOO DAVID H”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

2 patents

US5818682AOct 6, 1998

Method and apparatus for optimizing a dechucking period used to dechuck a workpiece from an electrostatic chuck

APPLIED MATERIALS INC48 citations87

US9818585B2Nov 14, 2017

In situ plasma clean for removal of residue from pedestal surface without breaking vacuum

APPLIED MATERIALS INC9 citations82

GREEN RICHARD J

1 patent

US8900471B2Dec 2, 2014

In situ plasma clean for removal of residue from pedestal surface without breaking vacuum

GREEN RICHARD J6 citations77