Inventor

UEMATSU MASAKI

JP9 patents

⚠️ This page may combine multiple inventors who share the name “UEMATSU MASAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

YAMADA TAKAKAZU

3 patents

US8262798B2Sep 11, 2012

Shower head, device and method for manufacturing thin films

YAMADA TAKAKAZU6 citations70

US8197599B2Jun 12, 2012

Gas head and thin-film manufacturing apparatus

YAMADA TAKAKAZU5 citations60

US8118935B2Feb 21, 2012

Mixing box, and apparatus and method for producing films

YAMADA TAKAKAZU2 citations60

ULVAC INC

2 patents

US6933010B2Aug 23, 2005

Mixer, and device and method for manufacturing thin-film

ULVAC INC16 citations91

US7618493B2Nov 17, 2009

Device and method for manufacturing thin films

ULVAC INC17 citations82

TOSHIBA KK

1 patent

US5505440AApr 9, 1996

Apparatus for transporting card-like articles

TOSHIBA KK42 citations91

ULVAC CORP

1 patent

US5228052AJul 13, 1993

Plasma ashing apparatus

ULVAC CORP46 citations91

MASUDA TAKESHI

1 patent

US8591655B2Nov 26, 2013

Apparatus for the preparation of film

MASUDA TAKESHI6 citations71

UCHIDA HIROTO

1 patent

US8168001B2May 1, 2012

Film-forming apparatus and film-forming method

UCHIDA HIROTO3 citations59