Inventor
YOO YONG MIN
KR25 patents
⚠️ This page may combine multiple inventors who share the name “YOO YONG MIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM IP HOLDING BV
16 patentsUS10032792B2Jul 24, 2018
Semiconductor device and manufacturing method thereof
ASM IP HOLDING BV463 citations99
US9899405B2Feb 20, 2018
Semiconductor device and manufacturing method thereof
ASM IP HOLDING BV464 citations99
US10249577B2Apr 2, 2019
Method of forming metal interconnection and method of fabricating semiconductor apparatus using the method
ASM IP HOLDING BV414 citations98
US10134757B2Nov 20, 2018
Method of processing a substrate and a device manufactured by using the method
ASM IP HOLDING BV449 citations98
US10847529B2Nov 24, 2020
Substrate processing method and device manufactured by the same
ASM IP HOLDING BV10 citations83
US10622375B2Apr 14, 2020
Method of processing a substrate and a device manufactured by using the method
ASM IP HOLDING BV9 citations83
US10504901B2Dec 10, 2019
Substrate processing method and device manufactured using the same
ASM IP HOLDING BV10 citations83
US9330899B2May 3, 2016
Method of depositing thin film
ASM IP HOLDING BV8 citations81
US11195845B2Dec 7, 2021
Substrate processing method and device manufactured by the same
ASM IP HOLDING BV3 citations72
US10876218B2Dec 29, 2020
Substrate supporting plate, thin film deposition apparatus including the same, and thin film deposition method
ASM IP HOLDING BV2 citations72
US10644025B2May 5, 2020
Method of processing a substrate and a device manufactured by using the method
ASM IP HOLDING BV2 citations72
US10381226B2Aug 13, 2019
Method of processing substrate
ASM IP HOLDING BV1 citations62
US12270118B2Apr 8, 2025
Substrate supporting plate, thin film deposition apparatus including the same, and thin film deposition method
ASM IP HOLDING BV0 citations61
US11965262B2Apr 23, 2024
Substrate supporting plate, thin film deposition apparatus including the same, and thin film deposition method
ASM IP HOLDING BV0 citations61
US10438965B2Oct 8, 2019
Semiconductor device and manufacturing method thereof
ASM IP HOLDING BV0 citations52
US10395921B2Aug 27, 2019
Method of forming thin film
ASM IP HOLDING BV0 citations41
SAMSUNG ELECTRONICS CO LTD
4 patentsUS9029244B2May 12, 2015
Apparatus including 4-way valve for fabricating semiconductor device, method of controlling valve, and method of fabricating semiconductor device using the apparatus
SAMSUNG ELECTRONICS CO LTD417 citations99
US9702041B2Jul 11, 2017
Apparatus including 4-way valve for fabricating semiconductor device, method of controlling valve, and method of fabricating semiconductor device using the apparatus
SAMSUNG ELECTRONICS CO LTD1 citations63
US9406502B2Aug 2, 2016
Apparatus including 4-way valve for fabricating semiconductor device, method of controlling valve, and method of fabricating semiconductor device using the apparatus
SAMSUNG ELECTRONICS CO LTD0 citations52
US7708969B2May 4, 2010
Method of forming metal oxide
SAMSUNG ELECTRONICS CO LTD1 citations50