Inventor
SHIBATA HITOSHI
JP18 patents
⚠️ This page may combine multiple inventors who share the name “SHIBATA HITOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
5 patentsUS7250696B2Jul 31, 2007
Linear motor and X-Y stage
HITACHI LTD11 citations84
US7004694B2Feb 28, 2006
Linear drive apparatus
HITACHI LTD6 citations72
US7777371B2Aug 17, 2010
Linear drive apparatus having cores and coils which are positioned on opposite sides of the cores
HITACHI LTD2 citations61
US6876108B2Apr 5, 2005
Linear motor, its controlling method, and XY table
HITACHI LTD6 citations61
US6975048B2Dec 13, 2005
Drive apparatus and XY table utilizing the same
HITACHI LTD3 citations60