Inventor
SIU TSZ-SIN
HK8 patents
⚠️ This page may combine multiple inventors who share the name “SIU TSZ-SIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
6 patentsUS7255771B2Aug 14, 2007
Multiple zone carrier head with flexible membrane
APPLIED MATERIALS INC82 citations98
US7081042B2Jul 25, 2006
Substrate removal from polishing tool
APPLIED MATERIALS INC23 citations92
US8808062B2Aug 19, 2014
Multi-chamber carrier head with a textured membrane
APPLIED MATERIALS INC8 citations84
US10702971B2Jul 7, 2020
Textured membrane for a multi-chamber carrier head
APPLIED MATERIALS INC2 citations73
US7842158B2Nov 30, 2010
Multiple zone carrier head with flexible membrane
APPLIED MATERIALS INC7 citations73
US9452505B2Sep 27, 2016
Textured membrane for a multi-chamber carrier head
APPLIED MATERIALS INC2 citations62