P

Inventor

CHEN YU-KAI

TW70 patents
⚠️ This page may combine multiple inventors who share the name “CHEN YU-KAI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG CO LTD

23 patents
US11232947B1Jan 25, 2022

Ammonium fluoride pre-clean protection

TAIWAN SEMICONDUCTOR MFG CO LTD6 citations85
US11392039B2Jul 19, 2022

Photoresist baking apparatus with cover plate having uneven exhaust hole distribution

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11067897B1Jul 20, 2021

Photoresist baking apparatus with cover plate having uneven exhaust hole distribution

TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US11373905B2Jun 28, 2022

Semiconductor device pre-cleaning

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US10418279B2Sep 17, 2019

Method of forming contact metal

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations72
US9711402B1Jul 18, 2017

Method of forming contact metal

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US11378888B1Jul 5, 2022

Lens adjustment for an edge exposure tool

TAIWAN SEMICONDUCTOR MFG CO LTD3 citations69
US11029603B2Jun 8, 2021

Chemical replacement system

TAIWAN SEMICONDUCTOR MFG CO LTD3 citations69
US10857676B2Dec 8, 2020

Photoresist bottle replacement system

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations69
US11740558B2Aug 29, 2023

Photoresist baking apparatus with cover plate having uneven exhaust hole distribution

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12300542B2May 13, 2025

Semiconductor device pre-cleaning

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12300900B2May 13, 2025

Ammonium fluoride pre-clean protection

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12211747B2Jan 28, 2025

Method of forming contact metal

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12046510B2Jul 23, 2024

Conductive feature formation and structure

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11915976B2Feb 27, 2024

Semiconductor device pre-cleaning

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11791208B2Oct 17, 2023

Method of forming contact metal

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11232985B2Jan 25, 2022

Method of forming contact metal

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11031286B2Jun 8, 2021

Conductive feature formation and structure

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US12025533B2Jul 2, 2024

System and method for liquid leak detection

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11899368B2Feb 13, 2024

Manufacturing method of semiconductor device and semiconductor processing system

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11454891B2Sep 27, 2022

Manufacturing method of semiconductor device and semiconductor processing system

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11199466B2Dec 14, 2021

System and method for liquid leak detection

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations60
US11061333B2Jul 13, 2021

Manufacturing method of semiconductor device and semiconductor processing system

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60

FEGO PREC IND CO LTD

6 patents

PROTAI PHOTONIC CO LTD

6 patents

(unassigned)

6 patents

RICHTEK TECHNOLOGY CORP

3 patents

UNIV NAT FORMOSA

2 patents

IND TECH RES INST

1 patent

CHEN YU-KAI

1 patent

CHIAN YIH OPTOTECH CO LTD

1 patent

CHANG WEN-YUAN

1 patent

Showing the top 50 of 70 patents by PatentIndex Score.