Inventor
HYAKUDOMI TAKANORI
JP9 patents
Patents
9 patentsUS6739208B2May 25, 2004
Method of delivering target object to be processed, table mechanism of target object and probe apparatus
TOKYO ELECTRON LTD37 citations90
US7477064B2Jan 13, 2009
Probing apparatus and positional deviation acquiring method
TOKYO ELECTRON LTD10 citations80
US7221177B2May 22, 2007
Probe apparatus with optical length-measuring unit and probe testing method
TOKYO ELECTRON LTD11 citations80
US11099236B2Aug 24, 2021
Inspection device and contact method
TOKYO ELECTRON LTD1 citations61
US7397257B2Jul 8, 2008
Detection method/device of probe's tip location using a transparent film attached to a substate having plurality of electrodes, and a storage medium for implementing the method
TOKYO ELECTRON LTD5 citations61
US11454664B2Sep 27, 2022
Testing system
TOKYO ELECTRON LTD0 citations54
US9863977B2Jan 9, 2018
Method of contacting substrate with probe card
TOKYO ELECTRON LTD1 citations51
US11360115B2Jun 14, 2022
Inspection system
TOKYO ELECTRON LTD0 citations47
US7679387B2Mar 16, 2010
Inspection method, inspection apparatus, and control program for performing electrical inspection by using probe
TOKYO ELECTRON LTD0 citations39