Inventor
TSAI YU-TING
TW15 patents
⚠️ This page may combine multiple inventors who share the name “TSAI YU-TING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
9 patentsUS11437477B1Sep 6, 2022
Fluorine-free interface for semiconductor device performance gain
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations71
US12091752B2Sep 17, 2024
Apparatus and method of manufacturing interconnect structures
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12564024B2Feb 24, 2026
Semiconductor arrangement and method of making
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12363985B2Jul 15, 2025
Fluorine-free interface for semiconductor device performance gain
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11908909B2Feb 20, 2024
Fluorine-free interface for semiconductor device performance gain
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11670547B2Jun 6, 2023
Semiconductor arrangement and method of making
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12310027B2May 20, 2025
Semiconductor device and method of manufacturing the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US11950424B2Apr 2, 2024
Semiconductor device and method of manufacturing the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US12241157B2Mar 4, 2025
System and method for cleaning a pre-clean process chamber
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations56