Inventor
SHIRAIWA NORIO
JP15 patents
⚠️ This page may combine multiple inventors who share the name “SHIRAIWA NORIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SHINKO ELECTRIC IND CO
12 patentsUS9240340B2Jan 19, 2016
Electrostatic chuck
SHINKO ELECTRIC IND CO10 citations81
US10304718B2May 28, 2019
Electrostatic chuck device
SHINKO ELECTRIC IND CO3 citations71
US10147628B2Dec 4, 2018
Electrostatic chuck and semiconductor-liquid crystal manufacturing apparatus
SHINKO ELECTRIC IND CO3 citations70
US11862501B2Jan 2, 2024
Electrostatic chuck and substrate fixing device
SHINKO ELECTRIC IND CO0 citations61
US10600669B2Mar 24, 2020
Substrate fixture and substrate fixing device
SHINKO ELECTRIC IND CO1 citations61
US9252039B2Feb 2, 2016
Electrostatic chuck apparatus
SHINKO ELECTRIC IND CO2 citations60
US12291780B2May 6, 2025
Tray and substrate fixing device
SHINKO ELECTRIC IND CO0 citations51
US8023246B2Sep 20, 2011
Electrostatic chuck and method of manufacturing the same
SHINKO ELECTRIC IND CO1 citations51
US9837297B2Dec 5, 2017
Tray and wafer holding apparatus
SHINKO ELECTRIC IND CO0 citations50
US9660557B2May 23, 2017
Electrostatic chuck and method for manufacturing the electrostatic chuck
SHINKO ELECTRIC IND CO1 citations49
US7483256B2Jan 27, 2009
Electrostatic chuck
SHINKO ELECTRIC IND CO0 citations40
US10847401B2Nov 24, 2020
Wafer holding apparatus and baseplate structure
SHINKO ELECTRIC IND CO0 citations29