Inventor

WU TUNG LI

TW7 patents

⚠️ This page may combine multiple inventors who share the name “WU TUNG LI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG CO LTD

4 patents

US12429783B2Sep 30, 2025

EUV lithography apparatus and operating method for mitigating contamination

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61

US9709904B2Jul 18, 2017

Lithography apparatus having dual reticle edge masking assemblies and method of use

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51

US9658536B2May 23, 2017

In-line inspection and clean for immersion lithography

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations50

US12500108B2Dec 16, 2025

Bonding system and method

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations47

TAIWAN SEMICONDUCTOR MFG

1 patent

US7285147B2Oct 23, 2007

Air supply systems and pressure adjustment devices for use therewith

TAIWAN SEMICONDUCTOR MFG9 citations67

PENG JUI-CHUN

1 patent

US8237132B2Aug 7, 2012

Method and apparatus for reducing down time of a lithography system

PENG JUI-CHUN2 citations60

WU TUNG-LI

1 patent

US9081297B2Jul 14, 2015

Lithography apparatus having dual reticle edge masking assemblies and method of use

WU TUNG-LI2 citations56