Inventor
OMORI TSUTAE
JP21 patents
⚠️ This page may combine multiple inventors who share the name “OMORI TSUTAE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
20 patentsUS6709523B1Mar 23, 2004
Silylation treatment unit and method
TOKYO ELECTRON LTD53 citations96
US6306455B1Oct 23, 2001
Substrate processing method
TOKYO ELECTRON LTD65 citations96
US5803970ASep 8, 1998
Method of forming a coating film and coating apparatus
TOKYO ELECTRON LTD82 citations96
US5695817ADec 9, 1997
Method of forming a coating film
TOKYO ELECTRON LTD92 citations96
US5505781AApr 9, 1996
Hydrophobic processing apparatus including a liquid delivery system
TOKYO ELECTRON LTD64 citations96
US6635113B2Oct 21, 2003
Coating apparatus and coating method
TOKYO ELECTRON LTD31 citations92
US6491452B2Dec 10, 2002
Developing method and developing apparatus
TOKYO ELECTRON LTD16 citations92
US6458208B1Oct 1, 2002
Film forming apparatus
TOKYO ELECTRON LTD40 citations92
US6361600B1Mar 26, 2002
Film forming apparatus and film forming method
TOKYO ELECTRON LTD23 citations92
US6165552ADec 26, 2000
Film forming method
TOKYO ELECTRON LTD41 citations92
US5681614AOct 28, 1997
Hydrophobic treatment method involving delivery of a liquid process agent to a process space
TOKYO ELECTRON LTD31 citations92
US6713239B2Mar 30, 2004
Developing method and developing apparatus
TOKYO ELECTRON LTD14 citations84
US6203218B1Mar 20, 2001
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD17 citations84
US6872670B2Mar 29, 2005
Silylation treatment unit and method
TOKYO ELECTRON LTD6 citations74
US6682777B2Jan 27, 2004
Substrate processing method
TOKYO ELECTRON LTD7 citations74
US6398429B1Jun 4, 2002
Developing method and developing apparatus
TOKYO ELECTRON LTD12 citations74
US6238848B1May 29, 2001
Developing method and developing apparatus
TOKYO ELECTRON LTD12 citations74
USD415184SOct 12, 1999
Apparatus for manufacturing a semiconductor for a liquid crystal display
TOKYO ELECTRON LTD15 citations71
US6706322B2Mar 16, 2004
Film forming apparatus and film forming method
TOKYO ELECTRON LTD4 citations63
USD415776SOct 26, 1999
Apparatus for manufacturing a semiconductor for a liquid crystal display
TOKYO ELECTRON LTD5 citations60