Inventor
JI LILI
CN11 patents
⚠️ This page may combine multiple inventors who share the name “JI LILI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
3 patentsUS9725302B1Aug 8, 2017
Wafer processing equipment having exposable sensing layers
APPLIED MATERIALS INC18 citations91
US9975758B2May 22, 2018
Wafer processing equipment having exposable sensing layers
APPLIED MATERIALS INC8 citations83
US10026597B2Jul 17, 2018
Hydrogen plasma based cleaning process for etch hardware
APPLIED MATERIALS INC1 citations49