Inventor
SATOH TAKAMI
JP20 patents
Patents
20 patentsUS5505781AApr 9, 1996
Hydrophobic processing apparatus including a liquid delivery system
TOKYO ELECTRON LTD64 citations96
US5518552AMay 21, 1996
Method for scrubbing and cleaning substrate
TOKYO ELECTRON LTD54 citations95
US5488964AFeb 6, 1996
Washing apparatus, and washing method
TOKYO ELECTRON LTD45 citations95
US5345639ASep 13, 1994
Device and method for scrubbing and cleaning substrate
TOKYO ELECTRON LTD67 citations95
US5887604AMar 30, 1999
Washing apparatus, and washing method
TOKYO ELECTRON LTD21 citations92
US5782990AJul 21, 1998
Method for washing objects
TOKYO ELECTRON LTD23 citations92
US5681614AOct 28, 1997
Hydrophobic treatment method involving delivery of a liquid process agent to a process space
TOKYO ELECTRON LTD31 citations92
US5671764ASep 30, 1997
Washing apparatus, and washing method
TOKYO ELECTRON LTD21 citations92
US5514852AMay 7, 1996
Heat treatment device
TOKYO ELECTRON LTD21 citations92
US9881799B2Jan 30, 2018
Substrate liquid processing apparatus, substrate liquid processing method, and computer-readable storage medium
TOKYO ELECTRON LTD2 citations73
US9109934B2Aug 18, 2015
Solution processing apparatus, solution processing method, and non-transitory computer-readable recording medium
TOKYO ELECTRON LTD5 citations72
US10573539B2Feb 25, 2020
Substrate liquid processing apparatus
TOKYO ELECTRON LTD6 citations71
US10483137B2Nov 19, 2019
Substrate liquid processing apparatus, substrate liquid processing method, and storage medium
TOKYO ELECTRON LTD3 citations70
US10276408B2Apr 30, 2019
Flow-rate regulator device, diluted chemical-liquid supply device, liquid processing apparatus and its operating system
TOKYO ELECTRON LTD2 citations70
US10067514B2Sep 4, 2018
Substrate processing apparatus and liquid mixing method
TOKYO ELECTRON LTD4 citations69
US8054612B2Nov 8, 2011
Plug-in unit including a breaker and an electric device
TOKYO ELECTRON LTD2 citations55
US9631963B2Apr 25, 2017
Solution processing apparatus, solution processing method, and non-transitory computer-readable recording medium
TOKYO ELECTRON LTD0 citations51
US11433420B2Sep 6, 2022
Solution supply apparatus and solution supply method
TOKYO ELECTRON LTD0 citations45
US10714365B2Jul 14, 2020
Liquid processing apparatus
TOKYO ELECTRON LTD0 citations45
US9887092B2Feb 6, 2018
Etching method, etching apparatus, and storage medium
TOKYO ELECTRON LTD0 citations36