Inventor
HAWTHORNE RICHARD C
US16 patents
⚠️ This page may combine multiple inventors who share the name “HAWTHORNE RICHARD C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MICRON TECHNOLOGY INC
15 patentsUS5783495AJul 21, 1998
Method of wafer cleaning, and system and cleaning solution regarding same
MICRON TECHNOLOGY INC173 citations99
US6235145B1May 22, 2001
System for wafer cleaning
MICRON TECHNOLOGY INC110 citations98
US6207587B1Mar 27, 2001
Method for forming a dielectric
MICRON TECHNOLOGY INC78 citations96
US5990019ANov 23, 1999
Selective etching of oxides
MICRON TECHNOLOGY INC58 citations95
US5685951ANov 11, 1997
Methods and etchants for etching oxides of silicon with low selectivity in a vapor phase system
MICRON TECHNOLOGY INC53 citations95
US6029680AFeb 29, 2000
Method for in situ removal of particulate residues resulting from cleaning treatments
MICRON TECHNOLOGY INC23 citations92
US5928969AJul 27, 1999
Method for controlled selective polysilicon etching
MICRON TECHNOLOGY INC34 citations92
US5770263AJun 23, 1998
Method for in situ removal of particulate residues resulting from hydrofluoric acid cleaning treatments
MICRON TECHNOLOGY INC20 citations92
US5749975AMay 12, 1998
Process for dry cleaning wafer surfaces using a surface diffusion layer
MICRON TECHNOLOGY INC40 citations92
US5716535AFeb 10, 1998
Methods and etchants for etching oxides of silicon with low selectivity
MICRON TECHNOLOGY INC33 citations92
US5785875AJul 28, 1998
Photoresist removal process using heated solvent vapor
MICRON TECHNOLOGY INC29 citations91
US6399504B1Jun 4, 2002
Methods and etchants for etching oxides of silicon with low selectivity
MICRON TECHNOLOGY INC5 citations74
US6010949AJan 4, 2000
Method for removing silicon nitride in the fabrication of semiconductor devices
MICRON TECHNOLOGY INC8 citations70
US6432841B1Aug 13, 2002
Method for forming a dielectric
MICRON TECHNOLOGY INC2 citations63
US6210489B1Apr 3, 2001
Methods and etchants for etching oxides of silicon with low selectivity
MICRON TECHNOLOGY INC2 citations63