Inventor

FUJIKAWA KAZUNORI

JP5 patents

⚠️ This page may combine multiple inventors who share the name “FUJIKAWA KAZUNORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

DAINIPPON SCREEN MFG

2 patents

US5704493AJan 6, 1998

Substrate holder

DAINIPPON SCREEN MFG80 citations95

US5331987AJul 26, 1994

Apparatus and method for rinsing and drying substrate

DAINIPPON SCREEN MFG74 citations94

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD

1 patent

US4970626ANov 13, 1990

Electrolytic capacitor and method of preparing it

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD45 citations88

SCREEN HOLDINGS CO LTD

1 patent

US10651029B2May 12, 2020

Substrate processing apparatus and substrate processing method

SCREEN HOLDINGS CO LTD2 citations67

MIYAGI MASAHIRO

1 patent

US9142433B2Sep 22, 2015

Substrate processing apparatus and substrate processing method

MIYAGI MASAHIRO3 citations60