Inventor
DAVIS SHAWN D
US23 patents
Patents
23 patentsUS5779799AJul 14, 1998
Substrate coating apparatus
MICRON TECHNOLOGY INC120 citations99
US5885353AMar 23, 1999
Thermal conditioning apparatus
MICRON TECHNOLOGY INC170 citations98
US6417117B1Jul 9, 2002
Spin coating spindle and chuck assembly
MICRON TECHNOLOGY INC48 citations96
US6403933B1Jun 11, 2002
Thermal conditioning apparatus
MICRON TECHNOLOGY INC28 citations95
US6599571B2Jul 29, 2003
Spin coating methods
MICRON TECHNOLOGY INC17 citations92
US6221157B1Apr 24, 2001
Spin coating bowl exhaust system
MICRON TECHNOLOGY INC19 citations92
US6061605AMay 9, 2000
Methods of treating a semiconductor wafer
MICRON TECHNOLOGY INC20 citations92
US6051074AApr 18, 2000
Thermal conditioning apparatus
MICRON TECHNOLOGY INC18 citations92
US5985031ANov 16, 1999
Spin coating spindle and chuck assembly
MICRON TECHNOLOGY INC17 citations92
US5769945AJun 23, 1998
Spin coating bowl exhaust system
MICRON TECHNOLOGY INC31 citations92
US6909276B2Jun 21, 2005
Rotating gripper wafer flipper
MICRON TECHNOLOGY INC17 citations91
US6828772B1Dec 7, 2004
Rotating gripper wafer flipper
MICRON TECHNOLOGY INC24 citations91
US6113694ASep 5, 2000
Substrate treatment apparatus
MICRON TECHNOLOGY INC15 citations82
US6107609AAug 22, 2000
Thermal conditioning apparatus
MICRON TECHNOLOGY INC12 citations81
US6090209AJul 18, 2000
Thermal conditioning apparatus
MICRON TECHNOLOGY INC13 citations81
US6511540B1Jan 28, 2003
Spin coating spindle and chuck assembly
MICRON TECHNOLOGY INC5 citations74
US6477440B1Nov 5, 2002
Methods of treating a semiconductor wafer
MICRON TECHNOLOGY INC7 citations74
US6162295ADec 19, 2000
Spin coating spindle and chuck assembly
MICRON TECHNOLOGY INC7 citations74
US6171402B1Jan 9, 2001
Thermal conditioning apparatus
MICRON TECHNOLOGY INC7 citations73
US6162294ADec 19, 2000
Spin coating bowl exhaust system
MICRON TECHNOLOGY INC7 citations73
US6150638ANov 21, 2000
Thermal conditioning apparatus
MICRON TECHNOLOGY INC3 citations73
US6132802AOct 17, 2000
Methods for exhausting a wafer coating apparatus
MICRON TECHNOLOGY INC8 citations73
US6937005B2Aug 30, 2005
Rotating gripper wafer flipper
MICRON TECHNOLOGY INC3 citations61