Inventor
KAMAREHI MOHAMMAD
US27 patents
⚠️ This page may combine multiple inventors who share the name “KAMAREHI MOHAMMAD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FUSION SYSTEMS CORP
7 patentsUS5498308AMar 12, 1996
Plasma asher with microwave trap
FUSION SYSTEMS CORP53 citations96
US5227698AJul 13, 1993
Microwave lamp with rotating field
FUSION SYSTEMS CORP101 citations96
US4749915AJun 7, 1988
Microwave powered electrodeless light source utilizing de-coupled modes
FUSION SYSTEMS CORP114 citations95
US4633140ADec 30, 1986
Electrodeless lamp having staggered turn-on of microwave sources
FUSION SYSTEMS CORP91 citations95
US4954755ASep 4, 1990
Electrodeless lamp having hybrid cavity
FUSION SYSTEMS CORP50 citations92
US5961851AOct 5, 1999
Microwave plasma discharge device
FUSION SYSTEMS CORP37 citations90
US5767626AJun 16, 1998
Electrodeless lamp starting/operation with sources at different frequencies
FUSION SYSTEMS CORP6 citations60
MKS INSTR INC
6 patentsUS11222770B2Jan 11, 2022
Microwave applicator with solid-state generator power source
MKS INSTR INC10 citations81
US10790118B2Sep 29, 2020
Microwave applicator with solid-state generator power source
MKS INSTR INC7 citations79
US9831066B1Nov 28, 2017
Compact microwave plasma applicator utilizing conjoining electric fields
MKS INSTR INC5 citations69
US11956885B2Apr 9, 2024
Method and apparatus for impedance matching in a power delivery system for remote plasma generation
MKS INSTR INC3 citations68
US12289820B2Apr 29, 2025
Method and apparatus for impedance matching in a power delivery system for remote plasma generation
MKS INSTR INC0 citations56
US11476092B2Oct 18, 2022
System and method of power generation with phase linked solid-state generator modules
MKS INSTR INC0 citations48
LAM RES CORP
5 patentsUS7638004B1Dec 29, 2009
Method for cleaning microwave applicator tube
LAM RES CORP8 citations83
US8048329B2Nov 1, 2011
Methods for implementing highly efficient plasma traps
LAM RES CORP6 citations72
US7562638B2Jul 21, 2009
Methods and arrangement for implementing highly efficient plasma traps
LAM RES CORP2 citations61
US7554053B2Jun 30, 2009
Corrugated plasma trap arrangement for creating a highly efficient downstream microwave plasma system
LAM RES CORP3 citations61
US7679024B2Mar 16, 2010
Highly efficient gas distribution arrangement for plasma tube of a plasma processing chamber
LAM RES CORP0 citations40
MATRIX INTEGRATED SYSTEMS INC
3 patentsUS6263830B1Jul 24, 2001
Microwave choke for remote plasma generator
MATRIX INTEGRATED SYSTEMS INC87 citations98
US6412438B2Jul 2, 2002
Downstream sapphire elbow joint for remote plasma generator
MATRIX INTEGRATED SYSTEMS INC17 citations92
US6352050B2Mar 5, 2002
Remote plasma mixer
MATRIX INTEGRATED SYSTEMS INC30 citations92
FUSION LIGHTING INC
3 patentsUS5594303AJan 14, 1997
Apparatus for exciting an electrodeless lamp with an increasing electric field intensity
FUSION LIGHTING INC114 citations97
US5841242ANov 24, 1998
Electrodeless lamp with elimination of arc attachment
FUSION LIGHTING INC36 citations92
US5831386ANov 3, 1998
Electrodeless lamp with improved efficacy
FUSION LIGHTING INC33 citations89