Inventor
COX GERALD M
US14 patents
⚠️ This page may combine multiple inventors who share the name “COX GERALD M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MATRIX INTEGRATED SYSTEMS INC
7 patentsUS6263830B1Jul 24, 2001
Microwave choke for remote plasma generator
MATRIX INTEGRATED SYSTEMS INC87 citations98
US6228773B1May 8, 2001
Synchronous multiplexed near zero overhead architecture for vacuum processes
MATRIX INTEGRATED SYSTEMS INC64 citations95
US6412438B2Jul 2, 2002
Downstream sapphire elbow joint for remote plasma generator
MATRIX INTEGRATED SYSTEMS INC17 citations92
US6352050B2Mar 5, 2002
Remote plasma mixer
MATRIX INTEGRATED SYSTEMS INC30 citations92
US6736927B2May 18, 2004
Apparatus for increased workpiece throughput
MATRIX INTEGRATED SYSTEMS INC9 citations72
US6605226B2Aug 12, 2003
Method for increased workpiece throughput
MATRIX INTEGRATED SYSTEMS INC9 citations72
US6409932B2Jun 25, 2002
Method and apparatus for increased workpiece throughput
MATRIX INTEGRATED SYSTEMS INC11 citations72