Inventor
KOUNO TAKUYA
JP6 patents
Patents
6 patentsUS6437858B1Aug 20, 2002
Aberration measuring method, aberration measuring system and aberration measuring mask
TOSHIBA KK33 citations92
US6163376ADec 19, 2000
Alignment apparatus, aberration measuring method and aberration measuring mark
TOSHIBA KK24 citations91
US7546178B2Jun 9, 2009
Aligner evaluation system, aligner evaluation method, a computer program product, and a method for manufacturing a semiconductor device
TOSHIBA KK14 citations83
US6558852B1May 6, 2003
Exposure method, reticle, and method of manufacturing semiconductor device
TOSHIBA KK12 citations70
US7269470B2Sep 11, 2007
Aligner evaluation system, aligner evaluation method, a computer program product, and a method for manufacturing a semiconductor device
TOSHIBA KK4 citations62
US7100146B2Aug 29, 2006
Design system of alignment marks for semiconductor manufacture
TOSHIBA KK2 citations62