Inventor

KACHALOV MIKHAIL Y

US2 patents

Patents

2 patents

US6992261B2Jan 31, 2006

Sputtering target assemblies using resistance welding

CABOT CORP51 citations89

US7425093B2Sep 16, 2008

Thermography test method and apparatus for bonding evaluation in sputtering targets

CABOT CORP27 citations86