Inventor
SUEMATSU KENICHI
JP16 patents
⚠️ This page may combine multiple inventors who share the name “SUEMATSU KENICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
14 patentsUS7138629B2Nov 21, 2006
Testing apparatus using charged particles and device manufacturing method using the testing apparatus
EBARA CORP151 citations99
US7928382B2Apr 19, 2011
Detector and inspecting apparatus
EBARA CORP51 citations98
US7741601B2Jun 22, 2010
Testing apparatus using charged particles and device manufacturing method using the testing apparatus
EBARA CORP36 citations96
US7365324B2Apr 29, 2008
Testing apparatus using charged particles and device manufacturing method using the testing apparatus
EBARA CORP49 citations96
US8946631B2Feb 3, 2015
Testing apparatus using charged particles and device manufacturing method using the testing apparatus
EBARA CORP11 citations92
US9406480B2Aug 2, 2016
Testing apparatus using charged particles and device manufacturing method using the testing apparatus
EBARA CORP3 citations84
US7425703B2Sep 16, 2008
Electron beam apparatus, a device manufacturing method using the same apparatus, a pattern evaluation method, a device manufacturing method using the same method, and a resist pattern or processed wafer evaluation method
EBARA CORP16 citations84
US10074510B2Sep 11, 2018
Inspection system and inspection image data generation method
EBARA CORP3 citations73
US8796621B2Aug 5, 2014
Detector and inspecting apparatus
EBARA CORP1 citations63
US10002740B2Jun 19, 2018
Inspection device
EBARA CORP0 citations52
US9852878B2Dec 26, 2017
Surface processing apparatus
EBARA CORP0 citations52
US10446404B2Oct 15, 2019
Electron-beam irradiated area adjustment method and adjustment system, electron-beam irradiated region correction method, and electron beam irradiation apparatus
EBARA CORP0 citations41
US9760984B2Sep 12, 2017
Control unit for generating timing signal for imaging unit in inspection system and method for sending out timing signal to imaging unit
EBARA CORP0 citations41
US9105445B2Aug 11, 2015
Inspection system, inspection image data generation method, inspection display unit, defect determination method, and storage medium on which inspection display program is recorded
EBARA CORP0 citations41